Semiconductor Strain Metrology: Principles and Applications - Paperback
Semiconductor Strain Metrology: Principles and Applications - Paperback
$151.45
/
Your payment information is processed securely. We do not store credit card details nor have access to your credit card information.
by Terence K. S. Wong (Author)
This book surveys the major and newly developed techniques for semiconductor strain metrology. Semiconductor strain metrology has emerged in recent years as a topic of great interest to researchers involved in thin film and nanoscale device characterization. This book employs a tutorial approach to explain the principles and applications of each technique specifically tailored for graduate students and postdoctoral researchers. Selected topics include optical, electron beam, ion beam and synchrotron x-ray techniques. Unlike earlier references, this book specifically discusses strain metrology as applied to semiconductor devices with both depth and focus.
